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May 06, 2024
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MEGR 8104 - Fabrication of Nanomaterials Lithographic methods (CVD, PVD, e-beam, ion beam, magnetron, evaporation, spin coating, mask fabrication, developing resists); microelectromechanical systems and nanoelectromechanical systems; limits of conventional mechanical processing, electroforming, growth mechanisms (organic, inorganic, thermal); powders. Credit will not be awarded for MEGR 8104 where credit has been awarded for ECGR 7104 or MEGR 7104 .
Credit Hours: (3) Prerequisite(s): NANO 8101 or permission of instructor. Cross-listed as: ECGR 7104 and MEGR 7104 . Most Recently Offered (Day): Spring 2016, Spring 2015 Most Recently Offered (Evening): Course has not been offered at this time in the past 3 years
Schedule of Classes
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